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Department of Chemistry, University of Bayreuth, Universitätsstraße 30, 95447 Bayreuth, Germany Article Views are the COUNTER-compliant sum of full text article downloads since November 2008 (both PDF ...
Abstract: In the advanced-tech node's shallow trench insulation (STI) chemical mechanical planarization (CMP) process development, by doing design of experiments (DOEs) and repeat runs, the scratch ...
Abstract: Polarimetry is typically restricted to far-field characterization of a target using beam-like waves, which results in a 2 x 2 scattering matrix representation under two orthogonal in-plane ...