A new approach combining atomic layer deposition and organic film etch process may solve critical challenges in the various processes in advanced nodes. We demonstrated a high selective and ...
AUSTIN, Texas — AmberWave Systems Corp. (Salem, N.H.) claims to have worked out a form of strained silicon that removes the silicon germanium layer and simply provides an ultrathin silicon top layer ...
A pathway for ALD-enhanced materials to be quickly developed and transitioned from lab-scale to commercial production is available for almost any application, for the first time ever. Atomic-level ...
Some results have been hidden because they may be inaccessible to you
Show inaccessible results
Feedback