Abstract: Silicon-based micro-electromechanical systems (MEMS) can be fabricated using bulk and surface micromachining technology. A micro mirror designed as an oscillatory MEMS constitutes a ...
Abstract: 3-D printing is used to fabricate mold for micro-structuring the polydimethylsiloxane (PDMS) elastomeric dielectric layer in capacitive flexible pressure sensors. It is shown that, despite ...
Some results have been hidden because they may be inaccessible to you
Show inaccessible results