Abstract: Silicon-based micro-electromechanical systems (MEMS) can be fabricated using bulk and surface micromachining technology. A micro mirror designed as an oscillatory MEMS constitutes a ...
Abstract: 3-D printing is used to fabricate mold for micro-structuring the polydimethylsiloxane (PDMS) elastomeric dielectric layer in capacitive flexible pressure sensors. It is shown that, despite ...